LMSE - Laboratory of Microsensor Structures and Electronics

Laboratory of Microsensor Structures and Electronics

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Activities
Physics & device modelling
Semiconductor & MEMS technologies
•	Photolithography
•	Diffusion & oxidation
•	Wet etching & wafer cleaning
•	Thin film deposition & etching
Material and device characterization
Electronics

Devices
Projects
Equipment ARRS

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Lectures

Electronics

Developed sensors, actuators and/or microfluidic systems are supported by application specific smart electronics

Micropump control module MM-L