Laboratory of Microsensor Structures and Electronics
Faculty of Electrical Engineering
Thin film deposition & etching
| PVD |
| PECVD |
| RIE |
| DRIE |
| Surface cleaning |
University of Ljubljana
|
|
Laboratory of Microsensor Structures and Electronics
|
Faculty of Electrical Engineering |
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|
|
Thin film deposition & etching
|
University of Ljubljana |