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Laboratory of Microsensor Structures and Electronics
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Faculty of Electrical Engineering
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Physics & device modelling
Semiconductor & MEMS technologies
•Photolithography
•Diffusion & oxidation
•Wet etching & wafer cleaning
•Thin film deposition & etching
Material and device characterization
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Photolitography
  • Canon PLA501 FA mask aligner , adapted for double side alignment
  • MTI Multifab automatic resist dispense spinner with edge bead remover, bake hot plate, filtration 0.02μm
  • Ultratech 602 mask cleaner
  • BlueM oven for resist hard bake
  • YES LPIII HMDS adhesion promoter
Spinner
MTI Multifab spinner
Aligner
Canon PLA501 FA mask aligner
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University of Ljubljana