LMSE - Laboratory of Microsensor Structures and Electronics

Laboratory of Microsensor Structures and Electronics

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Activities
Physics & device modelling
Semiconductor & MEMS technologies
•	Photolithography
•	Diffusion & oxidation
•	Wet etching & wafer cleaning
•	Thin film deposition & etching
Material and device characterization
Electronics

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Lectures

Wet etching & wafer cleaning

Wet station