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Laboratory of Microsensor Structures and Electronics
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Faculty of Electrical Engineering
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Physics & device modelling
Semiconductor & MEMS technologies
Photolithography
Diffusion & oxidation
Wet etching & wafer cleaning
Thin film deposition & etching
Material and device characterization
Electronics
Devices
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Devices
 

Membrane sensor structures
Cantilever actuators
Micro-optical benches
Silicon optical sensors
Silicon radiation sensors
Smart sensors
Microreactors
Nerve-root retractor

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University of Ljubljana