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Laboratory of Microsensor Structures and Electronics
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Faculty of Electrical Engineering
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Material and device characterization


Electrical characterization
  • HP 4145 B Semiconductor Parametric Analyzer
  • HP 4284A Precision LCR meter
  • HP 4140 B pA - meter, DC voltage source
  • HP 4280 A 1MHz C - meter, CV plotter + Mercury Probe Hg-401RL
  • HP 3457A Multimeter
  • Wentworth AWP 1050 Automatic Wafer Prober with TEMPTRONIC termochuck TP 0315A-TS-2 - HP PC with IEEE controller interface card
Clean room
Instruments for electrical characterization
Clean room
Devices electrical characterization

Optical and mechanical characterization
  • PHILTEC cross-sectioner for characterization of diffused layers
  • Atcor APC-1000 Air-born Particle Counter , sensitivity 0.3 - 5.0 µm particles
  • OLYMPUS optical microscopes: magn. 50-1000x, backlight, dark-field
  • Taylor-Hobson Talysurf Surface Profiler for measuring thin film thickness and roughness, range 10nm-4mm, resolution 10nm, travel length 0,5-120mm, scan speed 0,5mm/s, applied force on the stylus 0,7-1mN
  • Workbench for process parameter measurements and characterizati
  • LEITZ Ergolux for critical dimensions measurements (resolution 10nm)
Clean room
LEITZ Ergolux
  • Sheet resistivity prober: VEECO 4 point measurement AIT CMT-SR2000N automatic 4-point resistivity prober (wafers up to 200mm, range 1mohm/sq - 2Mohm/sq, 10µohmcm - 200KOhmcm, current source 10nA-100mA, accuracy 0,5%)
Clean room
VEECO AIT CMT-SR2000N
  • Spectroscopic ellipsometer SpecEL-2000-VIS, mikropack (thin film thickness and refractive index measurements, HeNe 1mW laser, angles 70°, 50° in 30°, range 0-6000nm, accuracy ± 0,3nm)
Clean room
SpecEL-2000-VIS
  • Olympus Confocal Laser Scanning Microscope LEXT OLS 3000
Clean room
LEXT OLS 3000
  • pH Meter Metrom 780 (automatic stirrer control, a multi-point calibration with up to nine buffers, a method memory and various monitoring functions)
Clean room
pH meter Metrom 780
  • Platform for testing of microfluidic chips
Clean room
-Multichannel pressure controller OB1 MK3+
MUX flow switch matrices
MUX Quake valve switch matrices
MFS flow sensors