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Laboratory of Microsensor Structures and Electronics
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Faculty of Electrical Engineering
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Physics & device modelling
Semiconductor & MEMS technologies
•Photolithography
•Diffusion & oxidation
•Wet etching & wafer cleaning
•Thin film deposition & etching
Material and device characterization
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Surface cleaning
ATTO
Diener Plasma System ATTO

Diener Plasma System ATTO
  • Surface cleaning
  • Surface activation
  • Surface etching
  • Surface deposition - plasmapolymerization
  • Gases: O2. H2

PVD
PECVD
RIE
DRIE
Surface cleaning

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University of Ljubljana