L
aboratory of
M
icrosensor
S
tructures and
E
lectronics
Faculty of Electrical Engineering
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hysics & device modelling
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emiconductor & MEMS technologies
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hotolithography
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iffusion & oxidation
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et etching & wafer cleaning
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hin film deposition & etching
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aterial and device characterization
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lectronics
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Droplet generator
Droplet generator
M
embrane sensor structures
C
antilever actuators
M
icro-optical benches
S
ilicon optical sensors
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ilicon radiation sensors
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mart sensors
M
icroreactors
N
erve-root retractor
M
icropumps
M
icroneedles
M
icromixers
M
icrodosing systems
LOC
devices
D
roplet generator
B
iosensors
University of Ljubljana
