L
aboratory of
M
icrosensor
S
tructures and
E
lectronics
Faculty of Electrical Engineering
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hysics & device modelling
S
emiconductor & MEMS technologies
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P
hotolithography
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D
iffusion & oxidation
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W
et etching & wafer cleaning
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T
hin film deposition & etching
M
aterial and device characterization
E
lectronics
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Lectures
LOCs
test LOC device
M
embrane sensor structures
C
antilever actuators
M
icro-optical benches
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ilicon optical sensors
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ilicon radiation sensors
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mart sensors
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icroreactors
N
erve-root retractor
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icropumps
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icroneedles
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icromixers
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icrodosing systems
LOC
devices
D
roplet generator
B
iosensors
University of Ljubljana
