Laboratory of Microsensor Structures and Electronics
Faculty of Electrical Engineering
Membrane sensor structures
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Basic structure
Four p-type piezoresistors diffused into silicon membrane, connected in Wheatstone bridge configuration for temperature compensation. Membrane realized by bulk micromachining: 33% KOH etchant, at 80°C, thickness 20μm Aplicationspressure sensors, humidity sensors, bio/chem sensors, etc. | ||
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University of Ljubljana