Laboratory of Microsensor Structures and Electronics
Faculty of Electrical Engineering
Micro-optical benches
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Micromirrors
Various silicon crystal planes can be open by anisotropic etching and used as reflecting out-of-plane or in-plane optical micromirrors. Structured mirror walls: angle 45°, 55°, 25° | ||||||
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Micromirrors and optical in-plane beam manipulation paths walls of etched structure orthogonal to wafer surface / wafer orientation <001>
Characterization setup of silicon reflecting mirror plane quality by beam image dispersion | ||||||
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University of Ljubljana