logo LMSE
Laboratory of Microsensor Structures and Electronics
faks_logo
Faculty of Electrical Engineering
Home
Activities
Physics & device modelling
Semiconductor & MEMS technologies
Photolithography
Diffusion & oxidation
Wet etching & wafer cleaning
Thin film deposition & etching
Material and device characterization
Electronics
Devices
Projects
Equipment ARRS
Members
Contact
Lectures

Valid HTML 4.01 Strict


Silicon radiation sensors
High sensitivity x-ray microstrip detectors with side illumination

LMSE designed and fabricated Si detectors with side illuminated irradiation for high sensitivity and high spatial resolution, appropriate in tissue examination for mammography


Radiation Sensors 1
 

Membrane sensor structures
Cantilever actuators
Micro-optical benches
Silicon optical sensors
Silicon radiation sensors
Smart sensors
Microreactors
Nerve-root retractor
Micropumps
Microneedles
Micromixers
Microdosing systems
LOC devices
Droplet generator
Biosensors

uni_logo
University of Ljubljana